SIMCO ECM main series monitor controll electrostatic chucks (ESCs)

SIMCO's ECM (Electrostatic Chuck Monitoring) series is mainly used for monitoring and controlling electrostatic chucks (ESCs). It is divided into multiple sub-series according to different application requirements.  

SIMCO ECM main series and representative models

1. ECM-H series (high-end industrial grade)

Features: high-precision, multi-channel monitoring, support for advanced data analysis and communication protocols (such as Ethernet, SECS/GEM), suitable for advanced semiconductor manufacturing.

Representative models:

ECM-H1 (single-channel monitoring)

ECM-H2 (dual-channel monitoring)

ECM-H4 (four-channel monitoring, suitable for multi-chuck equipment)

2. ECM-N series (economical basic model)

Features: cost optimization, compact size, suitable for small and medium-sized equipment or budget-sensitive scenarios, ECM-N-Lite belongs to this series.

Representative models:

ECM-N-Lite (basic single-channel monitoring, optional RS-485 communication)

ECM-N1 (single channel, slightly more powerful than Lite version)

ECM-N2 (dual channel monitoring)

3. ECM-P series (portable/laboratory)

Features: portable design, suitable for R&D, laboratory or equipment debugging.

Representative models:

ECM-P1 (handheld electrostatic chuck tester)

ECM-P2 (with data logging function)

4. ECM-Pro series (professional multi-channel system)

Features: support complex ESC systems, such as multi-zone heating chucks or high-precision process control.

Representative models:

ECM-Pro4 (four-channel independent control)

ECM-Pro8 (eight channels, suitable for large equipment)