SIMCO ECM-N series monitor controll electrostatic chucks (ESCs)

Purpose: Cost-effective Electrostatic Chuck (ESC) monitoring for semiconductor packaging, FPD (flat-panel display), and entry-level fab equipment.

Key Features

Affordable ESC Monitoring

Budget-friendly alternative to high-end ECM-H/Pro series

Ideal for non-critical processes where ultra-high precision isn’t required

Core Functions

Voltage/current monitoring (0-3kV DC typical)

Basic fault detection (short circuit, insulation failure)

Relay alarm output for equipment safety

Compact & Easy to Integrate

DIN rail mountable (saves panel space)

Simple wiring (screw terminals)

Optional RS-485 (Modbus RTU) for data logging

Reliable for Standard Apps

Works with Coulomb-type & basic JR-type ESCs

Supports DC-only electrostatic chucks (no AC mode)

Typical Applications

Semiconductor Backend

Die attach, wire bonding equipment

PCB-level ESC testing

FPD Manufacturing

Fixing glass substrates in OLED/LCD inspection

Legacy Equipment Upgrades

Retrofitting older tools without SECS/GEM

Training & Education

Demonstrating ESC principles in tech schools

ECM-N Series Models

ECM-N-Lite- Single-channel, no commsBasic ESC health checks

ECM-N1- Adds RS-485 (Modbus)Small-scale automation

ECM-N2- Dual-channel monitoringTwo-zone ESC or backup systems

ECM-N4- 4-channel (limited temp sensing)Entry-level multi-wafer handling