SIMCO ECM-P series electrostatic chuck (ESC) monitors

The SIMCO ECM-P series is a line of portable, laboratory-grade electrostatic chuck (ESC) monitors designed for research, development, and equipment troubleshooting. These handheld devices provide real-time measurement of critical ESC parameters, making them ideal for:

Semiconductor process development

ESC performance validation

Equipment maintenance & failure analysis

Academic research & small-scale production

Key Features

Portable & Battery-Powered

Compact, handheld design (typically <1 kg)

Rechargeable Li-ion battery (4-8 hours runtime)

Real-Time Monitoring

Measures voltage (0-5kV), current (µA to mA), and temperature (if equipped)

Detects insulation resistance degradation (early warning for ESC aging)

User-Friendly Interface

LCD touchscreen for live data display

Data logging (stores 100+ test cycles)

USB/Bluetooth for data export

Wide ESC Compatibility

Works with Coulomb-type & Johnsen-Rahbek (JR) ESC

Supports DC & AC electrostatic chucks

ECM-P Series Models

Model Key Specifications Typical Use Cases

ECM-P1- Basic voltage/current monitoringLab testing, quick ESC diagnostics

ECM-P2-Adds temperature sensing (RTD/Pt100)Process development, thermal studies

ECM-P3-Advanced diagnostics (leakage current, arc detection)Failure analysis, high-voltage ESC

ECM-P4 (New)-Multi-zone monitoring (2 independent channels)Research on multi-electrode ESC designs