Entegris filters Wafergard series Wafergard® SG F Mini XL gas filter

The Wafergard series of Entegris filters is a series of high-performance gas filters, mainly used in semiconductors, photovoltaics and other fields, with high-precision filtration, high flow and other characteristics. The following is a detailed introduction:

Product Features

High-precision filtration: It can provide particle filtration with a precision of 0.0015 microns or even higher, which can effectively remove tiny particle impurities in the gas, ensure that the gas entering the process reaches ultra-high purity, and meet the strict requirements of high-tech industries such as semiconductors for process gases.

High flow design: Some models can achieve higher process gas flux while ensuring high-precision filtration, which can improve production efficiency and meet the process requirements of large-scale integrated circuit manufacturing and other processes with high gas flow requirements.

Compact design: Surface mount filters such as Wafergard C-seal and W-seal have a small footprint, which can save space on the gas panel and help improve the integration and space utilization of the equipment.

Good compatibility: It has excellent compatibility with various semiconductor process gases such as inert gases, hydride gases and reactive gases, ensuring stable and reliable operation in different process environments.

A variety of materials are available: Made of nickel, stainless steel, Alloy-22, PTFE and other materials to meet different chemical compatibility and process conditions.

Some models and parameters

Wafergard® SG F Mini XL gas filter: flow rate up to 120slpm, with 1/4" gasket seal (VCR® compatible) and 1/4" compression seal (Swagelok® compatible) connection methods, lengths of 127mm and 115.5mm respectively.

Wafergard® SG Max Gas Filters: Available in 500slpm and 1000slpm flow rates, 1/4", 3/8" and 1/2" connection sizes, gasket seal (VCR compatible) and compression seal (Swagelok compatible), and lengths from 112.7mm to 141.2mm.

Wafergard® SG F Micro Gas Filters: Available in 60slpm flow rates, 1/4" gasket seal (VCR® compatible) or 1/4" compression seal (Swagelok® compatible), and lengths from 84.1mm to 73.7mm, respectively.