Entegris Wafergard® SG Max Gas Filters are inline PTFE (polytetrafluoroethylene) gas filters designed for high flow and low differential pressure applications. In addition to the features and parameters mentioned above, here is more information:
Filter element material: Hydrophobic PTFE membrane supported by molded PFA structure, with excellent chemical stability and corrosion resistance, can work stably in a variety of complex chemical environments.
Downstream cleanliness: less than 0.03 particles/liter (greater than 0.01 microns), volatile substances (silver) less than 10ppb, water and oxygen below the detection limit (minimum detection limit is 5ppb), can provide ultra-high purity gas for the process.
Helium leak rate: tested to 1×10⁻⁹atm - cc/sec, qualified standard is 2×10⁻¹⁰atm - cc/sec, the leak rate is extremely low, ensuring the sealing and gas purity during the gas filtration process.
Warranty period: Bronze version has a 1-year warranty, Silver version has a 3-year warranty, which reflects the quality reliability of the product and the manufacturer's confidence in the product.