Entegris filters Wafergard series Wafergard® SG F Micro Gas Filters

Entegris Wafergard® SG F Micro Gas Filters is a micro gas filter launched by Entegris. It is mainly used in semiconductor, photovoltaic and other fields. It has the characteristics of high-precision filtration and good compatibility. The following is a detailed introduction:

Product Features

High-efficiency filtration: It can provide excellent particulate filtration and effectively remove tiny particle impurities in the gas. The retention rate is 9L RV at the rated flow rate, which helps to improve the production output of photovoltaic cells and display manufacturing.

Excellent material: The filter element is a hydrophobic PTFE membrane, supported by molded PTFE, PFA structure and PFA O-ring, and the shell is electrolytically polished 316L stainless steel, which has good corrosion resistance and chemical stability.

Good compatibility: Compatible with high-purity gases, including N₂, CDA, H₂, SiH₄ and NF₃, etc., and can be widely used in a variety of gas filtration scenarios.

Strong pressure tolerance: At 23°C, the maximum positive pressure difference is 4.14bar, and the maximum reverse pressure difference is 0.69bar, which can work stably under a certain pressure environment.

Specifications

Flow rate: 60 liters/minute.

Connector size: You can choose 1/4" gasket seal (VCR compatible) or 1/4" compression seal (Swagelok compatible).

Length: 1/4" gasket seal type length is 84.1 mm (3.31 inches), 1/4" compression seal type length is 73.7 mm (2.90 inches).

Application areas: Suitable for equipment such as gas panels, gas cabinets, and occasions where ultra-pure gases are required in wafer processing. It can be used for filtering inert gases and reactive gases, including ozone and other gases.