Entegris filters Trinzik™ PSP Dilute Process Filter precision filtration

Entegris Trinzik™ PSP Dilute Process Filter is a dilution process filter from Entegris, mainly used in batch wet processes in semiconductors and other fields, aiming to improve process yield and filtration efficiency. The relevant introduction is as follows:

Filter medium: It uses a high-porosity hydrophilic polytetrafluoroethylene (PTFE) membrane, which helps to achieve high flow rates and can process more fluids in a limited time, thereby reducing operating costs. At the same time, the small-pore membrane design can effectively remove particles and achieve advanced particle removal effects, which helps to increase production.

Structural material: The filter body adopts a polypropylene (PP) structure, which can reduce extractables, ensure clean filtration operations, avoid contamination of the filter medium, and ensure the purity of the filtration process.

Application scenarios: It is suitable for low-temperature etching baths, dilute chemical circulation baths, and post-polishing cleaning. It can perform advanced filtration of aqueous phases, degassing, and corrosive acid-base chemicals. It is a solution for particle, gel, agglomeration, and metal ion contamination in chemicals, water, and other process materials.

Performance parameters: Maximum reverse pressure is 3.4bar (50psid) @25°C (77°F), and the maximum operating temperature is 80°C (176°F).

Other features: All components meet USP<88> Class VI plastic testing, providing biosafety and global regulatory compliance. Sterilization level meets bacterial challenge test ASTM F838, which ensures the removal of microorganisms from the fluid stream without adversely affecting the product.