Entegris filters Trinzik™ XFX Filter precision filtration

Entegris filters Trinzik™ XFX Filter is a product for precision filtration launched by Entegris. It is mainly used in high-viscosity circulation application scenarios to improve chemical cleanliness. The relevant introduction is as follows:

Structure and material: It adopts a full PFA and PTFE structure, and the membrane material is pre-wetted, non-wetting PTFE. This material property gives it good chemical stability and corrosion resistance, and can adapt to a variety of chemical environments. At the same time, it can reduce extractables and help improve the purity of the filter medium.

Filtration performance: It has a unique high-flow membrane, and its customized PTFE membrane morphology can achieve the highest flow rate on the market. This filter is a 10nm PTFE filter. The small pore size membrane design can effectively remove particles and achieve advanced particle removal effects, which helps to increase device yields and complete tank turnover faster.

Application advantages: It has better compatibility with high-viscosity applications, and the filter has a smaller footprint, which can play an efficient filtering role in a limited space. It is suitable for advanced batch chemical production and final filtration, as well as single wafers and batch tools.