Entegris filters precision filtration Multiple material options

Entegris filters are commonly used precision filtration products in high-performance industries such as semiconductors and biomedicine. They have excellent performance and reliable quality. The following is a detailed introduction:

Product Features

High-precision filtration: Gas filters can provide 0.0015 microns or even higher precision particle filtration, which can effectively remove tiny particle impurities in the gas and meet the strict requirements of high-tech industries such as semiconductors for process gases.

Multiple material options: Made of nickel, stainless steel, alloy-22, PTFE and other materials to meet different chemical compatibility and process conditions. For example, nickel filters can be used to treat corrosive gases, and PTFE filters can be used for gases with extremely high purity requirements and mild chemical properties.

High flow design: Some models, such as the Wafergard series, can achieve higher process gas flux while ensuring high-precision filtration, which can improve production efficiency and meet the process requirements of large-scale integrated circuit manufacturing and other processes with high gas flow requirements.

Compact design: Surface-mount gas filters, such as the Wafergard C-seal and W-seal series, have a small footprint, save space on the gas panel, and help improve the integration and space utilization of the equipment.

Good compatibility: Excellent compatibility with various semiconductor process gases, including inert gases, hydride gases, and reactive gases, ensuring stable and reliable operation in different process environments.

Detailed introduction of Entegris filter series

The Entegris filter series in the United States has multiple series, mainly including gas filters and liquid filters, which are widely used in semiconductor, pharmaceutical and other industries. The following is a detailed introduction:

Gas filter series

Wafergard series: Suitable for high temperature and dynamic pressure applications, it is an ideal choice for high-purity gas systems. Among them, the Wafergard IV alloy 22 filter uses HASTELLOY®C-22® alloy, which can provide excellent particulate filtration for ultra-pure and corrosive gas systems, with the highest compatibility with inert and reactive gases.

Liquid filter series

Pharmsteri™ series: including Pharmsteri™PP cartridge filter, Pharmsteri™II PES 0.22 buffer capsule filter, etc. PSTP series PP cartridge filter is a full polypropylene structure, which can effectively remove particulate and colloidal contaminants in pharmaceutical and food and beverage applications, and has excellent chemical compatibility. Pharmsteri™II PES 0.22 buffer capsule filter is gamma stable and autoclavable, and the sterilization level meets the bacterial challenge test ASTM F838, which can ensure the removal of microorganisms from the fluid stream.

Trinzik™ series: Trinzik™UPW ultrapure water filter, Trinzik™PSP dilution process filter, etc. Trinzik™UPW ultrapure water filter adopts high porosity, hydrophilic PTFE membrane, which can reliably control the contaminants that cause defects in bulk ultrapure water and deionized water applications, and is suitable for semiconductor, flat panel display and other industries. Trinzik™PSP dilution process filter is a high flow filter that can achieve the fastest process cleanup in semiconductor applications.

Azora™ Photochemical Filters: Filter media designed to improve critical photochemical performance in bulk chemical and point-of-use filtration applications. Innovative polyimide membrane morphology improves containment removal efficiency, is compatible with photoresists, photosolvents, and acidic chemicals, and is available in cartridge, disposable, and POU filters to meet different application needs