Entegris filters Trinzik™ series precision filtration

Entegris filters Trinzik™ series precision filtration is a filtration product mainly used in the semiconductor and other electronic industries. It is designed to control pollutants in solvents, acid and alkali solutions and ultrapure water to improve product purity and production efficiency. The following is a detailed introduction:

Performance advantages:

High filtration efficiency: It can effectively remove contaminants such as particles, gels, agglomerates, and metal ions in the fluid. Some models can achieve 1nm level particle retention, ensuring high purity of the fluid to meet the needs of high-precision industries such as semiconductors.

Fast flow rate: With high porosity membrane structure design, it can reach or exceed the flow rate of other commercially available filters, and can process more volume of fluid in a limited time, which can improve production efficiency and reduce process time.

Good chemical compatibility: It can be used in a range of chemicals including acids and bases, and can adapt to various chemical processes in semiconductor manufacturing, such as photolithography, wet etching, etc.

Material properties: The filter membrane is made of PTFE, which is hydrophilic and hydrophobic, and has excellent chemical stability and corrosion resistance. The filter body is made of materials such as PP, HDPE or PFA, which are chemically stable and have low extractables. It will not contaminate the filter medium and ensure the purity of the filtration process.

Sterilization and compliance: The construction materials of some models are gamma-stable and autoclavable. They can be sterilized by corrosive agents or autoclaves, or integrated into disposable components for gamma irradiation. The sterilization level meets the bacterial challenge test ASTM F838, and all components meet the USP<88>Class VI plastic test, providing biosafety and global regulatory compliance.

Product models and features:

Trinzik™ High Flow Filter: There are HCE, HCM and HC0 configurations. The use of high-porosity hydrophilic and hydrophobic PTFE membranes can achieve high flow rates and reduce operating costs. The small-pore membrane design can effectively remove particles and increase production. The structure of polypropylene (PP) and high-density polyethylene (HDPE) materials can reduce extractables and ensure clean filtration.

Trinzik™ PSP Dilute Process Filter: Suitable for low-temperature etching baths, dilute chemical circulation baths, and post-polishing cleaning. Its high porosity hydrophilic PTFE membrane enables high flow rates and reduces operating costs, its small pore size membrane removes particles, its polypropylene structure also reduces extractables, and its maximum reverse pressure differential is 3.4 bar (50 psid) @25°C (77°F).

Trinzik™ XFX Filter: combines a unique high-flow membrane, all-PFA and PTFE structure, and a special cleaning process to improve chemical cleanliness in high-viscosity circulation applications. Its customized PTFE membrane morphology enables the highest flow rates on the market, and the 10nm PTFE filter can complete the tank turnover faster, is more compatible with high-viscosity applications, and has a smaller filter footprint.