RIKEN molecular pumps SMP compact MDP high performance UL industrial

A comprehensive introduction to RIKEN molecular pumps, including its core technologies, core product lines, and applicable applications. RIKEN's molecular pumps are centered around the Molecular Drag Pump (MDP), combining magnetic levitation technology to achieve revolutionary breakthroughs.

I. Core Technology: Molecular Drag Pump (MDP)

Operating Principle

A high-speed rotor (90,000+ rpm) collides with gas molecules, transferring momentum to the molecules and "dragging" them from the inlet to the exhaust, achieving ultra-high vacuum.

Disruptive Advantages

Features: Traditional Turbomolecular Pump (TMP) RIKEN MDP

Bearing Technology: Mechanical bearing (lubricated)

Magnetic bearing (contactless)

Ultimate Vacuum: 10⁻⁷ Pa

10⁻⁷~10⁻⁹ Pa

Light Gas Pumping Speed: Low (poor hydrogen/helium efficiency)

High (hydrogen compression ratio >10⁹)

Vibration/Noise: High: < 0.1 μm / <45 dB

Maintenance Requirements: Regular bearing/lubricant replacement

Lifetime maintenance-free

II. Overview of the RIKEN Molecular Pump Series

RIKEN molecular pumps are divided into four series based on pumping speed and application scenarios, covering the entire range from scientific research to industrial applications:

1. Compact Research-Grade (SMP Series)

Targeting: Desktop instruments, small vacuum chambers

Representative Models:

SMP-50: Pumping speed 50 L/s (nitrogen), gas inlet NW25

SMP-100: Pumping speed 100 L/s L/s (e.g., SMP-100-34B), gas inlet NW34

Applications:

▶ Electron microscopes (SEM/TEM)

▶ Portable mass spectrometers

▶ Quantum chip test chambers

2. Mid-size, high-performance series (MDP series)

Targeting: Core laboratory equipment, mid-size vacuum systems

Representative models:

MDP-300: Pumping speed 300 L/s, gas inlet CF100

MDP-500: Pumping speed 500 L/s, supports efficient helium extraction

Applications:

▶ Surface analysis (XPS, AES)

▶ Ion implanters

▶ Synchrotron radiation beamlines

3. Industrial-grade high-speed series (UL series)

Targeting: Semiconductor manufacturing, large-scale equipment

Representative models:

UL-800: Pumping speed 800 L/s, gas inlet CF160

UL-2000: Pumping speed 2000 L/s, integrated water cooling system

Applications:

▶ EUV lithography vacuum chamber

▶ Nuclear fusion experimental equipment (such as JT-60SA)

▶ Space environment simulation chamber

4. Customized Special Series

Ultra-high frequency magnetic levitation pump: Speed >120,000 rpm (for cold atom capture)

Corrosion-resistant: Titanium alloy rotor (for handling corrosive gases)

Ultra-low temperature pump: -196°C cryogenic operation (for quantum computing)

III. Unified Core Technology Advantages Across the Entire Series

Magnetic levitation bearings

Zero wear, shock resistance, and support for installation at any angle.

Oil-free design

Meets ISO Class 0 cleanroom standards, completely eliminating hydrocarbon contamination.

High-efficiency light gas extraction

Hydrogen/helium pumping speeds reach 2-3 times that of traditional TMPs (an essential requirement in the nuclear fusion and hydrogen energy sectors).

Intelligent Control

RS-485/Ethernet communication for real-time monitoring of vibration, temperature, and speed.

IV. Selection Guide: Matching Series by Scenario

Application Scenario Recommended Series Typical Model Key Requirements

Desktop Electron Microscope/Mass Spectrometer SMP Series SMP-100-34B: Compact, Low Vibration

Surface Analysis Laboratory MDP Series MDP-500: High Cleanliness, Medium Pumping Speed

Semiconductor Lithography System UL Series UL-2000: High Pumping Speed, Micro-Vibration Resistance

Quantum Computer Vacuum Chamber Customized Series Ultra-High Frequency Magnetic Levitation Pump: Extremely Low Vibration, Ultra-High Speed

Nuclear Fusion Device UL Series UL-800 + Corrosion-Resistant Version: Efficient Hydrogen Extraction, Plasma Resistance

V. Ecosystem Collaboration and Industrialization

Manufacturing Partners:

Ebara: Mass Production of Industrial-Grade MDP Pumps (such as the UL Series)

ULVAC: Integrated into Semiconductor Equipment

Global Deployment:

Adopted by research institutions and wafer fabs in over 30 countries, including:

▶ European Organization for Nuclear Research (CERN)

▶ TSMC EUV Production Line

Summary

RIKEN molecular pumps, with magnetic levitation molecular traction technology (MDP) at their core, cover all application scenarios with four series: SMP (compact), MDP (high-performance), UL (industrial), and customized. They have become the benchmark for ultra-high vacuum, pollution-free, and high-stability applications. Key selection parameters include pumping speed, gas type, cleanliness, and vibration tolerance.