RIKEN molecular pumps MDP high performance series

Below is a comprehensive analysis and model overview of the RIKEN MDP High Performance Series molecular pumps. This series is RIKEN's flagship product developed for large-scale scientific research equipment and industrial-grade vacuum systems. Focused on high pumping speeds, ultra-high vacuum, and extreme reliability, it meets the demands of cutting-edge fields such as nuclear fusion, synchrotron radiation, and semiconductor manufacturing.

I. Core Advantages of the Series

Features

Technical Implementation

User Value

Ultra-High Pumping Speed

Multi-stage compound rotor design, maximum pumping speed of 5000 L/s

Fast pumping of large chambers (≥ 1 m³)

Magnetically levitated ultra-high-speed rotor

Active Magnetic Bearing (AMB) control

Speed range of 60,000-90,000 rpm

Power ≤ 15 kW

Shock and vibration resistance

Lifespan > 100,000 hours

Efficient hydrogen and helium extraction

Patented spiral-turbine compound flow path, H₂ compression ratio > 10¹⁰

Essential for fuel gas processing in nuclear fusion devices

Dual-mode cooling: Air or water cooling options available, heat load capacity of 2.5 kW

Suitable for high-temperature process environments (such as plasma chambers)

ATEX/IECEx explosion-proof: All series certified to II 2G Ex h IIC T4 (explosion-proof for hydrogen environments)

Safe and compliant for the chemical and energy sectors

II. Model Specifications and Application Compatibility

Model

Pumping Speed (N₂) Ultimate Vacuum* Inlet Flange Power Core Applications

MDP-500 500 L/s 5 × 10⁻⁹ Pa CF-100 2.2 kW Medium-sized synchrotron beamlines, tokamaks

MDP-800 800 L/s 3 × 10⁻⁹ Pa CF-160 3.5 kW Semiconductor ion implanters, space environment simulation chambers

MDP-2000 2000 L/s 1 × 10⁻⁸ Pa CF-250 8.0 kW EUV lithography equipment, nuclear fusion experimental reactors (e.g., JT-60SA)

MDP-5000 5000 L/s 5 × 10⁻⁸ Pa DN-400 ISO 15 kW Particle accelerator vacuum tunnels, fusion demonstration reactors (DEMOs)

Note: Ultimate vacuum requires a dry backing pump (e.g., Leyvac DHD 2000)

Suffix Options:

/C: Corrosion-Resistant Version (Hastelloy Flow Channel)

/W: Water-Cooled Version (with Integrated Heat Exchanger)

/Ex: Explosion-Proof Certified Version

III. Selection Guide

1. Selection by Pumping Speed

≤ 800 L/s → MDP-500/MDP-800 (Medium-Scale Experimental Reactor, Beamline Terminal)

≥ 2000 L/s → MDP-2000/MDP-5000 (Fusion Reactor, Accelerator Tunnel)

2. Selection by Environmental Enhancement

Challenge Scenario Recommended Model Technical Solution

Hydrogen Atmosphere Explosion-Proof MDP-xxx/Ex Intrinsically Safe Circuit + Ex d Flameproof Enclosure

Corrosive Process Gas MDP-xxx/C Hastelloy C-276 Flow Channel

High-Temperature Plasma MDP-xxx/W Dual-Circuit Water Cooling (ΔT > 80°C)

3. Matching Backing Pump Solution

MDP Model Backing Pump Ultimate Vacuum

MDP-500 Edwards nXRV 320 6×10⁻⁹ Pa

MDP-2000 Leyvac DHD 2000 2×10⁻⁸ Pa

MDP-5000 Ebara DAP-8000 5×10⁻⁸ Pa