RIKEN molecular pumps SMP compact Series

The RIKEN SMP Compact series redefines the standard for desktop vacuum pumps with its extreme miniaturization, zero contamination, and zero vibration. It is particularly well-suited for cutting-edge fields such as electron microscopy, quantum technology, and semiconductor micromachining. Key selection considerations include pumping speed requirements, corrosive gases, and space constraints.

The following is a detailed technical analysis and selection guide for the RIKEN SMP Compact series molecular pumps. Designed for high-precision equipment with limited space, this series combines the advantages of magnetic levitation technology and molecular drag pumps (MDPs), making it an ideal vacuum solution for both scientific research and industrial desktop equipment.

I. Core Positioning of the SMP Series

Target Applications:

Desktop or compact equipment such as electron microscopes (SEM/TEM), portable mass spectrometers, quantum chip test chambers, and small coating machines.

Disruptive Advantages:

Oil-Free Cleaning | Zero Mechanical Vibration | Plug-and-Play | Lifetime Maintenance-Free

II. Key Parameter Comparison of All Models

Model Pumping Speed (N₂, L/s) Inlet Flange Weight Featured Applications

SMP-50 50 NW25/KF25 1.8 kg Desktop Mass Spectrometer, Micro Ion Trap

SMP-100 100 NW34/KF40 2.8 kg Compact Electron Microscope (TEM), X-ray Source

SMP-100-34B 100 CF-F34 2.8 kg Semiconductor ALD Chamber, Ultrahigh Vacuum Interconnect System

SMP-300 300 CF-F63 5.2 kg Mid-Scale Surface Analyzer (XPS), Laser Ablation

⚠️ Note: Ultimate vacuum ≤ 5×10⁻⁸ Pa (with dry forepump) for all models. Hydrogen compression ratio >10⁹.

III. Five Major Technological Breakthroughs

1. Ultra-Compact Magnetic Levitation Rotor

Diameter: Only 38 mm (SMP-100), 90,000 rpm

Carbon Fiber Reinforced Polymer (CFRP) Material → 3x Improved Centrifugal Deformation Resistance

2. Oil-Free Molecular Traction Technology

Single-stage compression achieves 10⁻⁸ Pa ultra-high vacuum, completely eliminating oil contamination (compared to the 10⁻² Pa limit of conventional scroll pumps)

3. Ultra-Low Vibration Transmission

Vibration Amplitude: < 0.1 μm → Ensures stability for sub-nanometer resolution equipment (such as TEM imaging)

4. Intelligent Temperature Control System

Power: ≤120 W → Cooling is achieved with natural air cooling (no external water cooling required)

Operating Temperature Range: -10°C to +50°C

5. Corrosion Resistance Upgrade Option

Optional titanium alloy (Ti6Al4V) rotor/flow channel, resistant to HF and Cl₂ Corrosive process gases

IV. Performance Verification in Typical Application Scenarios

▶ Case 1: Desktop Scanning Electron Microscope (SEM)

Equipment: Hitachi TM4000+ with SMP-100

Results:

Pumping down to 5×10⁻⁴ Pa: ≤90 seconds (vs. 15 minutes with a mechanical pump)

Image drift reduced by 82% (due to zero vibration)

▶ Case 2: Qubit Vacuum Cavity

Equipment: Superconducting Quantum Chip Test Platform with SMP-50

Results:

Maintaining a vacuum of 10⁻⁷ Pa, quantum coherence time extended to 150 μs (conventional systems only 20 μs due to oil contamination).

▶ Case 3: Semiconductor Atomic Layer Deposition (ALD)

Equipment: Cambridge NanoTech Savannah with SMP-100-34B

Results:

Thin film uniformity improved to 98.5% (due to reduced residual hydrogen)