RIKEN SMP-100-34B molecular pumps SMP compact Series

SMP Compact Series Positioning

Design Concept: Extremely Compact (Axial Length < 200 mm) + Zero-Vibration Magnetic Levitation + Oil-Free Ultra-High Vacuum

Applications:

Electron Microscopes (SEM/TEM)

Quantum Computing Superconducting Cavities

Portable Mass Spectrometers

Semiconductor ALD/Thin Film Coating Equipment

Series Model Pumping Speed (N₂) Inlet Flange Key Differentiators

SMP-50 50 L/s KF25/NW25 Minimum Volume (Ø80 mm)

SMP-100 100 L/s KF40/NW34 Economical Basic Model

SMP-100-34B 100 L/s CF-F34 Metal-Seal Ultra-High Vacuum

SMP-300 300 L/s CF-F63 Fast Pumpdown of Medium-Sized Chambers

⚠️ Key Note:

The SMP-100-34B is the only model in the series to come standard with a CF flange 100 L/s pump, directly compatible with UHV chambers (leak rate < 10⁻¹¹ Pa·m³/s)

Suffix 34B = Type B magnetron system (upgraded for magnetic field interference resistance)

Core Advantages of the SMP-100-34B Series

1.Ultra-high Vacuum Compatibility

Parameters SMP-100 (KF40) SMP-100-34B (CF-F34)

Sealing Method: Rubber O-ring, Metal Knife-Edge Seal

Ultimate Vacuum: 5×10⁻⁷ Pa, 5×10⁻⁸ Pa

Gas Permeability: 10⁻⁹ Pa·m³/s, <10⁻¹¹ Pa·m³/s

2. Improved Anti-Interference Capability (Type B magnetron)

Magnetic Field Tolerance: ≤ 50 mT (suitable for deployment near MRI equipment)

EMC Certification: IEC 61326-1 (Laboratory) + IEC 61000-6-4 (Industrial) Dual Standard

3. Corrosion-Resistant Option (/C Version)

Rotor Coated with Al₂O₃ Ceramic Layer (20 μm)

Flow Channel Lining: Hastelloy C-276

Applicable Gases: HF, Cl₂, O₃ (Semiconductor Etching Process)

Series General Technical Highlights

1. Magnetic Molecular Drag Technology (MDP)

Chart

Code

Single-Stage Compression Ratio: >10⁹ (For H₂, conventional turbo pumps only have 10⁶)

Zero Oil Contamination: Prevents hydrocarbons from affecting surface analysis/quantum experiments

2. Ultra-Quiet Operation

Model

Vibration Amplitude

Noise (1 m)

SMP-100-34B <0.1 μm 45 dB(A)

Competitive Turbopumps 0.5-1 μm >60 dB(A)

3. Intelligent Temperature Control System

Power ≤120 W → Free air cooling (no cooling water required)

Operating temperature: -10°C to +50°C (consistent across the entire series)

Scenario-based Performance Verification

▶ Transmission Electron Microscope (TEM) Application Comparison

Indicators: Traditional Mechanical Pump SMP-100-34B

Pumping to 5×10⁻⁵ Pa: 15 minutes 2 minutes

Sample Drift (60 minutes): 3 nm 0.3 nm

Maintenance: Oil change every 6 months; Lifetime maintenance-free

▶ Quantum Chip Packaging

Configuration: SMP-100-34B + Ebara DAP-40

Results:

Maintaining 10⁻⁷ Pa vacuum → Qubit decoherence time >150 μs (only 20 μs for oil-contaminated systems)

Selection Guide

1. Select by Chamber Type

Vacuum Chamber Recommended Model Reason

Rubber-sealed SMP-100 (KF40) chamber: Low cost and quick-connect compatible

Metal-sealed ultrahigh vacuum SMP-100-34B CF flange ensures ≤10⁻⁸ Pa ultimate vacuum.

For corrosive gas processes, SMP-xxx/C features corrosion-resistant Hastelloy flow channels.

2. Matching Backing Pump Solutions

Target Vacuum Recommended Combinations Ultimate Vacuum

≤10⁻⁷ Pa SMP-100-34B + Dry Diaphragm Pump 5 × 10⁻⁷ Pa

≤10⁻⁸ Pa SMP-100-34B + Dry Screw Pump 5 × 10⁻⁸ Pa

Classic Combination: SMP-100-34B + Ebara DAP-40 (Pumping Speed 40 m³/h)